Sekondari Kudzosa Mhepo chirongwa cheAir Conditioning System

Iyo micro-electronic workshop ine diki yakachena kamuri nzvimbo uye shoma radius yekudzoka mhepo duct inoshandiswa kutora yechipiri kudzoka mhepo chirongwa chemhepo inofefetera system. Ichi chirongwa chinowanzoshandiswa mumakamuri akachenamune mamwe maindasitiri akadai semishonga uye kurapwa. Nekuti vhoriyamu yekufemesa kuti isangane nezvinodiwa zvekuchenesa mukamuri tembiricha humidity kazhinji ishoma pane vhoriyamu yemhepo inodiwa kuti isvike padanho rehutsanana, saka, musiyano wetembiricha pakati pemhepo yekugovera nemhepo yekudzokera idiki. Kana iyo yekutanga kudzoka kwemhepo chirongwa ichishandiswa, mutsauko wekushisa pakati pekugovera air state point uye nzvimbo yedova yeair conditioning unit yakakura, kupisa kwechipiri kunodiwa, zvichikonzera kutonhora kwekupisa mukugadzirisa kwemhepo uye kushandiswa kwesimba. Kana chirongwa chechipiri chekudzoka kwemhepo chikashandiswa, mhepo yechipiri yekudzoka inogona kushandiswa kutsiva kupisa kwechipiri kwekutanga kudzoka kwemhepo. Kunyange zvazvo kugadziriswa kwechikamu chekutanga uye chechipiri chekudzoka kwemhepo kunenge kusinganzwisisiki kudarika kugadziriswa kwechipiri chekupisa, chirongwa chechipiri chekudzoka kwemhepo chave chichizivikanwa zvakanyanya semhepo inogadzirisa simba rekuchengetedza simba mumashopu maduku uye epakati-micro-electronic clean workshops.

Tora ISO kirasi 6 microelectronics yakachena workshop semuenzaniso, iyo yakachena workshop nzvimbo ye1 000 m2, kureba sirin'i yemamita matatu. Mukati magadzirirwo parameters tembiricha tn= (23±1) ℃, hama humidity φn=50%±5%; The design air supply volume is 171,000 m3/h, anenge 57 h-1 air exchange times, and the fresh air volume is 25 500 m3/h (iyo iyo muitiro inopedza mhepo inosvika 21 000 m3 / h, uye imwe yakasara ndeyekumanikidza kukanganiswa kwemhepo yemhepo). Iyo inonzwisisika inopisa mutoro mumusangano wakachena ndeye 258 kW (258 W / m2), iyo inopisa / humidity ratio ye air conditioner ndeye ε = 35 000 kJ / kg, uye kusiyana kwekushisa kwemhepo yekudzoka kwekamuri ndeye 4.5 ℃. Panguva ino, yekutanga kudzoka kwemhepo vhoriyamu ye
Iyi pari zvino ndiyo inonyanya kushandiswa nzira yekuchenesa air conditioning system mu microelectronics industry clean room, rudzi urwu rwehurongwa runogona kunyanya kukamurwa kuva marudzi matatu: AHU + FFU; MAU+AHU+FFU; MAU+DC (Dry coil) +FFU. Imwe neimwe ine zvayakanakira nezvayakaipira uye nzvimbo dzakakodzera, simba rekuchengetedza simba rinonyanya kuenderana nekuita kwesefa uye fan uye zvimwe zvishandiso.

1) AHU + FFU system.

Rudzi urwu rwemasystem mode runoshandiswa muindasitiri yemicroelectronics se "nzira yekuparadzanisa mhepo yekumisikidza uye chikamu chekuchenesa". Panogona kuva nemamiriro maviri ezvinhu: imwe ndeyokuti mhepo inogadzirisa inongoshanda chete nemhepo yakachena, uye iyo inobatwa nemhepo yakachena inotakura zvose zvinopisa uye kunyorova kwekamuri yakachena uye inoita semhepo yekuwedzera kuenzanisa mhepo inopera uye mhepo yakanaka inoputika yekamuri yakachena, iyi system inonziwo MAU + FFU system; Imwe yacho ndeyokuti mweya mutsva wega hauna kukwana kuzadzisa zvinotonhora uye zvinopisa zvinodikanwa zvemukamuri yakachena, kana nekuti mweya mutsva unogadziriswa kubva kunze kuenda kune dova chairo musiyano wemuchina unodiwa wakakurisa, uye chikamu chemukati memhepo (yakaenzana nemhepo yekudzoka) inodzoserwa kuair conditioning kurapwa unit, yakasanganiswa nemweya mutsva wekupisa uye kunyorova uye kutumirwa kumhepo. Yakasanganiswa nemhepo yakasara yakachena yekudzorera mhepo (yakaenzana nemhepo yechipiri yekudzoka), inopinda muFUFU unit uye inotumira muimba yakachena. Kubva 1992 kusvika 1994, munyori wechipiri webepa iri akashanda pamwe nekambani yeSingapore uye akatungamira vadzidzi vanopfuura gumi kuti vatore chikamu mukugadzirwa kweUS-Hong Kong mubatanidzwa weSAE Electronics Factory, iyo yakatora rudzi rwekupedzisira rwekuchenesa mhepo yekufemesa uye yekufemesa mhepo. Iyo purojekiti ine ISO Kirasi 5 kamuri yakachena inosvika zviuru zvitanhatu m2 (1,500 m2 iyo yakapihwa chibvumirano neJapan Atmospheric Agency). Imba yekufefetera mhepo inorongedzerwa kudivi rekamuri rakachena pamwe nemadziro ekunze, uye chete padyo nemukoridho. Mhepo yakachena, mhepo yekupedza uye pombi dzemhepo dzekudzoka ipfupi uye dzakarongwa zvakanaka.

2) MAU+AHU+FFU chirongwa.

Mhinduro iyi inowanzowanikwa mumiti yemicroelectronics ine tembiricha yakawanda uye humidity zvinodiwa uye misiyano yakakura mukupisa uye humidity mutoro, uye chiyero chehutsanana chakakwira zvakare. Muzhizha, mweya mutsva unotonhodzwa uye wakasvibiswa kusvika kune imwe nzvimbo yakagadziriswa. Kazhinji zvakakodzera kurapa mhepo yakachena kusvika painopindirana yeisometric enthalpy line uye 95% yehukama humidity line yekamuri yakachena ine mumiririri wekushisa uye humidity kana imba yakachena ine huru huru yemhepo yakachena. Huwandu hwemhepo hweMAU hunotarwa zvinoenderana nezvinodiwa zvekamuri yega yega yakachena kuzadza mhepo, uye inogoverwa kuAHU yekamuri yega yega yakachena ine mapaipi zvinoenderana neinodiwa mweya mutsva wemhepo, uye inosanganiswa neimwe yemukati yekudzoka mhepo yekupisa uye humidity kurapwa. Ichi chikamu chinotakura kupisa kwese uye humidity mutoro uye chikamu chemutoro mutsva werheumatism yekamuri yakachena iyo inoshanda. Mhepo inobatwa neAHU yega yega inotumirwa kune yekugovera mweya plenum mukamuri yega yega yakachena, uye mushure mekusanganiswa kwechipiri nemhepo yemukati yekudzoka, inotumirwa mukamuri neiyo FFU unit.

Mukana mukuru weiyo MAU + AHU + FFU mhinduro ndeyekuti pamusoro pekuita hutsanana uye kudzvanywa kwakanaka, zvakare inovimbisa kudziya kwakasiyana uye hunyoro hunyoro hunodiwa pakugadzirwa kwega rega rakachena. Nekudaro, kazhinji nekuda kwenhamba yeAHU yakamisikidzwa, tora nzvimbo yekamuri yakakura, iyo yakachena kamuri mweya mutsva, mhepo yekudzoka, mapombi emhepo ekupa crisscross, anotora nzvimbo yakakura, marongerwo akanyanya kunetsa, kuchengetedza uye manejimendi zvakanyanya kuoma uye zvakaoma, saka, hapana zvakakosha zvinodiwa sezvinobvira kudzivirira kushandiswa.