Sekondari Kudzosa Mhepo chirongwa cheAir Conditioning System

Iyo micro-electronic workshop ine diki yakachena kamuri nzvimbo uye shoma radius yekudzoka mhepo duct inoshandiswa kutora yechipiri kudzoka mhepo chirongwa chemhepo inofefetera system. Ichi chirongwa chinowanzoshandiswa mumakamuri akachenamune mamwe maindasitiri akadai semishonga uye kurapwa. Nekuti vhoriyamu yekufemesa kuti isangane nezvinodiwa zvekuchenesa mukamuri tembiricha humidity kazhinji ishoma pane vhoriyamu yemhepo inodiwa kuti isvike padanho rehutsanana, saka, musiyano wetembiricha pakati pemhepo yekugovera nemhepo yekudzokera idiki. Kana iyo yekutanga yekudzoka mhepo chirongwa ichishandiswa, mutsauko wekushisa pakati pekugovera air state point uye nzvimbo yedova yeair conditioning unit yakakura, kupisa kwechipiri kunodiwa, zvichikonzera kutonhora kwekupisa mukupisa kwemhepo uye kuwedzera simba rekushandisa. . Kana chirongwa chechipiri chekudzoka kwemhepo chikashandiswa, mhepo yechipiri yekudzoka inogona kushandiswa kutsiva kupisa kwechipiri kwekutanga kudzoka kwemhepo. Kunyangwe kugadziridzwa kweyekutanga uye yechipiri kudzoka kwemhepo chiyero kudiki kudiki kudiki pane kugadziridzwa kwekupisa kwechipiri, yechipiri kudzoka mhepo hurongwa yakave ichizivikanwa zvakanyanya semhepo inodzoreredza simba rekuchengetedza chiyero mumadiki uye epakati madiki micro-electronic yakachena workshops. .

Tora ISO kirasi 6 microelectronics yakachena workshop semuenzaniso, iyo yakachena workshop nzvimbo ye1 000 m2, kureba sirin'i yemamita matatu. Mukati magadzirirwo parameters tembiricha tn= (23±1) ℃, hama humidity φn=50%±5%; Iyo dhizaini yemhepo yekugovera vhoriyamu ndeye 171,000 m3 / h, inenge 57 h-1 nguva yekutsinhana kwemhepo, uye mhepo nyowani inosvika 25 500 m3 / h (iyo iyo nzira yekupedza mhepo inosvika 21 000 m3 / h, uye yasara positive pressure leakage air volume). Iyo inonzwisisika inopisa mutoro mumusangano wakachena ndeye 258 kW (258 W / m2), iyo inopisa / humidity ratio ye air conditioner ndeye ε = 35 000 kJ / kg, uye kusiyana kwekushisa kwemhepo yekudzoka kwekamuri ndeye 4.5 ℃. Panguva ino, yekutanga kudzoka kwemhepo vhoriyamu ye
Iyi pari zvino ndiyo inonyanya kushandiswa nzira yekuchenesa air conditioning system mu microelectronics industry clean room, rudzi urwu rwehurongwa runogona kunyanya kukamurwa kuva marudzi matatu: AHU + FFU; MAU+AHU+FFU; MAU+DC (Dry coil) +FFU. Imwe neimwe ine zvayakanakira nezvayakaipira uye nzvimbo dzakakodzera, simba rekuchengetedza simba rinonyanya kuenderana nekuita kwesefa uye fan uye zvimwe zvishandiso.

1) AHU + FFU system.

Rudzi urwu rwemasystem mode runoshandiswa muindasitiri yemicroelectronics se "nzira yekuparadzanisa mhepo yekumisikidza uye chikamu chekuchenesa". Panogona kunge paine mamiriro maviri: imwe ndeyekuti iyo air conditioning system inongobata nemhepo nyowani, uye iyo yakarapwa mweya mutsva inotakura kupisa uye kunyorova kwese kwemukamuri yakachena uye inoita seyekuwedzera mhepo kuenzanisa mhepo yekubuda uye yakanaka yekumanikidza kubuda. yekamuri yakachena, iyi system inonziwo MAU + FFU system; Imwe yacho ndeyokuti mweya mutsva wega hauna kukwana kuti usangane nekutonhora uye kupisa zvinodikanwa zvemukamuri yakachena, kana nekuti mweya mutsva unogadziriswa kubva kunze kwenyika kuenda kune dova rakasiyana enthalpy musiyano wemuchina unodiwa wakakura kwazvo. , uye chikamu chemhepo yemukati (yakaenzana nemhepo inodzoka) inodzoserwa kune air conditioning treatment unit, yakasanganiswa nemhepo yakachena yekupisa uye humidity kurapwa, uye inotumirwa kumhepo inopa plenum. Yakasanganiswa nemhepo yakasara yakachena yekudzorera mhepo (yakaenzana nemhepo yechipiri yekudzoka), inopinda muFUFU unit uye inotumira muimba yakachena. Kubva 1992 kusvika 1994, munyori wechipiri webepa iri akashanda pamwe nekambani yeSingapore uye akatungamira vadzidzi vanopfuura gumi kuti vatore chikamu mukugadzirwa kweUS-Hong Kong joint venture SAE Electronics Factory, iyo yakatora rudzi rwekupedzisira rwekuchenesa mhepo uye. ventilation system. Iyo purojekiti ine ISO Kirasi 5 kamuri yakachena inosvika zviuru zvitanhatu m2 (1,500 m2 iyo yakapihwa chibvumirano neJapan Atmospheric Agency). Imba yekufefetera mhepo inorongedzerwa kudivi rekamuri rakachena pamwe nemadziro ekunze, uye chete padyo nemukoridho. Mhepo yakachena, mhepo yekupedza uye pombi dzemhepo dzekudzoka ipfupi uye dzakarongwa zvakanaka.

2) MAU+AHU+FFU chirongwa.

Mhinduro iyi inowanzowanikwa mumiti yemicroelectronics ine tembiricha yakawanda uye humidity zvinodiwa uye misiyano yakakura mukupisa uye humidity mutoro, uye chiyero chehutsanana chakakwira zvakare. Muzhizha, mweya mutsva unotonhodzwa uye wakasvibiswa kusvika kune imwe nzvimbo yakagadziriswa. Kazhinji zvakakodzera kurapa mhepo yakachena kusvika painopindirana yeisometric enthalpy line uye 95% yehukama humidity line yekamuri yakachena ine mumiririri wekushisa uye humidity kana imba yakachena ine huru huru yemhepo yakachena. Huwandu hwemhepo hweMAU hunotarwa zvinoenderana nezvinodiwa zvekamuri yega yega yakachena kuzadza mhepo, uye inogoverwa kuAHU yekamuri yega yega yakachena ine pombi zvinoenderana neinodiwa mhepo yakachena, uye inosanganiswa neimwe yemukati yekudzoka mhepo yekupisa. uye kurapa humidity. Ichi chikamu chinotakura kupisa kwese uye humidity mutoro uye chikamu cheiyo rheumatism mitsva yekamuri yakachena iyo inoshanda. Mhepo inobatwa neAHU yega yega inotumirwa kune yekugovera mweya plenum mukamuri yega yega yakachena, uye mushure mekusanganiswa kwechipiri nemhepo yemukati yekudzoka, inotumirwa mukamuri neiyo FFU unit.

Mukana mukuru weiyo MAU + AHU + FFU mhinduro ndeyekuti pamusoro pekuita hutsanana uye kudzvanywa kwakanaka, zvakare inovimbisa kudziya kwakasiyana uye hunyoro hunyoro hunodiwa pakugadzirwa kwega rega rakachena. Nekudaro, kazhinji nekuda kwehuwandu hweAHU yakamisikidzwa, tora nzvimbo yekamuri yakakura, imba yakachena mhepo yakachena, mhepo yekudzoka, mapaipi emhepo ekupa crisscross, anotora nzvimbo yakakura, marongero akanyanya kunetsa, kuchengetedza uye manejimendi zvakanyanya kuoma. uye zvakaoma, saka, hapana zvakakosha zvinodiwa sezvinobvira kudzivirira kushandiswa.