Iko kukosha kwehunyoro hwehukama mune semiconductor (FAB) yakachena mukamuri

Iko kukosha kwehunyoro hwehukama mu semiconductor (FAB) mukamuri yakachena ingangoita 30 kusvika 50%, zvichibvumira muganho nhete wekukanganisa we ± 1%, senge mu lithography zone - kana kunyange kushoma mune kure ultraviolet processing (DUV) zone - nepo kumwe kunhu kunogona kudzikiswa kusvika ± 5%.
Nekuti hunyoro hune huwandu hwezvinhu zvinogona kuderedza kuita kwese kwemakamuri akachena, kusanganisira:
1. Kukura kwebhakitiriya;
2. Room tembiricha kunyaradza siyana yevashandi;
3. Electrostatic charge inooneka;
4. Metal corrosion;
5. Kutsikirira kwemhute yemvura;
6. Kuderedzwa kwezvinyorwa;
7. Kutorwa kwemvura.

Utachiona nezvimwe zvinosvibisa zvipenyu (mold, mavhairasi, fungi, mite) zvinogona kubudirira munzvimbo dzine hunyoro hunopfuura 60%. Dzimwe nharaunda dzebhakitiriya dzinogona kukura pahunyoro hunopfuura 30%. Iyo kambani inotenda kuti hunyoro hunofanirwa kudzorwa pakati pe40% kusvika 60%, iyo inogona kuderedza kukanganiswa kwebhakitiriya uye hutachiona hwekufema.

Hunyoro hunyoro muhuwandu hwe40% kusvika 60% ihwowo huwandu huri pakati nepakati hwekunyaradza kwevanhu. Hunyoro hwakawandisa hunogona kuita kuti vanhu vanzwe kutsvikinyidzana, nepo hunyoro huri pasi pe30% hunogona kuita kuti vanhu vanzwe vakaoma, ganda rakatsemuka, kusagadzikana kwekufema uye kusafara mupfungwa.

Kunyorova kwepamusoro kunoderedza kuunganidzwa kwechaji yemagetsi panzvimbo yekuchenesa - mhedzisiro inodiwa. Low humidity yakanakira kuunganidzwa kwechaji uye inogona kukuvadza sosi ye electrostatic discharge. Kana mwando unopfuura 50%, magetsi emagetsi anotanga kupera nekukurumidza, asi kana hunyoro hwehukama huri pasi pe30%, anogona kuramba kwenguva yakareba pane insulator kana nzvimbo isina pasi.

Hunyoro huri pakati pe35% ne40% hunogona kushandiswa senzira inogutsa, uye makamuri akachena semiconductor anowanzo shandisa mamwe madhiraivha kudzikamisa kuunganidzwa kwechaji yemagetsi.

Iko kumhanya kwemaitiro mazhinji emakemikari, kusanganisira corrosion process, ichawedzera nekuwedzera kwehunyoro hunyoro. Zvose zvinoratidzwa nemhepo yakapoteredza imba yakachena zvinokurumidza.